Determination of full material constants of ScAlN thin film from bulk and leaky Lamb waves in MEMS-based samples

Akira Konno, Michio Kadota, Jun Ichi Kushibiki, Yuji Ohashi, Masayoshi Esashi, Yasuo Yamamoto, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

20 Citations (Scopus)

Abstract

The full material constants of a 40% Sc-AlN thin film were systematically determined. First, 4 kinds of MEMS resonators and a Lamb wave resonator were used to determine the material constants as much as possible. The other unknown material constants together with the material constants which needed more accurate estimation were determined based on ultrasonic microspectroscopy and parameter fitting. The phase velocity versus frequency (v-f) characteristics of A0 and S0 mode leaky Lamb waves in a self-suspended ScAlN film were measured using an ultrasonic microscope, and then theoretical v-f characteristics were fitted to the measured ones by tuning the material constants as parameters.

Original languageEnglish
Title of host publicationIEEE International Ultrasonics Symposium, IUS
PublisherIEEE Computer Society
Pages273-276
Number of pages4
ISBN (Electronic)9781479970490
DOIs
Publication statusPublished - 2014 Oct 20
Event2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States
Duration: 2014 Sep 32014 Sep 6

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2014 IEEE International Ultrasonics Symposium, IUS 2014
CountryUnited States
CityChicago
Period14/9/314/9/6

Keywords

  • FEM simulation
  • MEMS resonator
  • Parameter fitting
  • Thin film characterization
  • Ultrasonic microspectroscopy

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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