Determination of diffusivities of Si self-diffusion and Si self-interstitials using isotopically enriched single-or multi-30Si epitaxial layers

S. Matsumoto, S. R. Aid, T. Sakaguchi, K. Toyonaga, Y. Nakabayashi, M. Sakuraba, Y. Shimamune, Y. Hashiba, Junichi Murota, K. Wada, T. Abe

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