Determination of angular dependence of lateral growth rate in liquid phase epitaxy of (0 0 1) InP

Yutaka Oyama, Toshio Kochiya, Ken Suto, Jun ichi Nishizawa

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

The angular dependences of the lateral growth rate are determined as the functions of growth temperature and growth time in liquid phase epitaxy of (0 0 1) InP at low growth temperature of 330-450 °C. From the observations of the deformation of artificially made tables after epitaxy, the lateral growth rate has a strong anisotropy in [1 1 0] direction especially at low growth temperature (Tg < 400 °C). This indicated that kink density was high in [1 1 0] direction on InP (0 0 1) surface. It is also shown that the anisotropy of lateral growth rate decreases as the growth temperature becomes high.

Original languageEnglish
Pages (from-to)267-274
Number of pages8
JournalJournal of Crystal Growth
Volume243
Issue number2
DOIs
Publication statusPublished - 2002 Aug

Keywords

  • A1. Crystal morphology
  • A1. Growth models
  • A1. Surface structure
  • A3. Liquid phase exitaxy
  • B1. Phosphides
  • B2. Semiconducting Indium compounds

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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