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Deteriorated device characteristics in 3D-LSI caused by distorted silicon lattice
Murugesan Mariappan, Yasuhiko Imai, Shigeru Kimura, Takafumi Fukushima, Ji Choel Bea, Hisashi Kino, Kang Wook Lee, Tetsu Tanaka, Mitsumasa Koyanagi
Research output: Contribution to journal › Article › peer-review
5
Citations
(Scopus)