Deteriorated device characteristics in 3D-LSI caused by distorted silicon lattice

Murugesan Mariappan, Yasuhiko Imai, Shigeru Kimura, Takafumi Fukushima, Ji Choel Bea, Hisashi Kino, Kang Wook Lee, Tetsu Tanaka, Mitsumasa Koyanagi

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science