Detection of trace water vapor using siOx-coated ball SAW sensor

Kosuke Takayanagi, Shingo Akao, Takayuki Yanagisawa, Noritaka Nakaso, Yusuke Tsukahara, Satoshi Hagihara, Toru Oizumi, Nobuo Takeda, Toshihiro Tsuji, Kazushi Yamanaka

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

In manufacturing process of semiconductor, blue light emitting diode (LED), and lithium ion battery, detection and monitoring of trace water vapor (<1 μmol/mol) are significantly important techniques. We have been researching about detection of trace water vapor with high speed and sensitivity by using ball surface acoustic wave (SAW) sensor. In this paper, we tried to detect trace water vapor by coating silicon oxide (SiOx) on ball SAW sensor using solgel method. It was confirmed that SiOx-coated ball SAW sensor could detect water vapor in a wide range from 95 to 0°C in frost point (0.0356.0

Original languageEnglish
Pages (from-to)988-993
Number of pages6
JournalMaterials Transactions
Volume55
Issue number7
DOIs
Publication statusPublished - 2014

Keywords

  • Ball surface acoustic wave (SAW) sensor
  • Hygrometer
  • Silicon oxide
  • Solgel method
  • Trace water vapor

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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