Detection of metastable chlorine ions in time-modulated plasma by time resolved laser-induced fluorescence

Shinya Kumagai, Minoru Sasaki, Mitsumasa Koyanagi, Kazuhiro Hane

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Metastable chlorine ions (Cl+*) were detected in time-modulated inductively coupled plasma by a time-resolved laser-induced fluorescence technique. By varying the rf power, gas pressure and modulation frequency, the Cl+* density was measured in detail. In the discharge-on period, the Cl+* density increased as the rf power increased. In the discharge-off period, the rf power decreased within 1 μs, however, the Cl+* density decreased more slowly and persisted for a while. The decay constant was evaluated to be around 10 μs by fitting the decay curve under our experimental conditions. In addition, the diffusion coefficient of Cl+* was also estimated.

Original languageEnglish
Pages (from-to)7126-7130
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume38
Issue number12 B
Publication statusPublished - 1999 Dec 1

Keywords

  • Chlorine plasma
  • Etching
  • Laser-induced fluorescence
  • Metastable chlorine ion
  • Time-modulated plasma

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Detection of metastable chlorine ions in time-modulated plasma by time resolved laser-induced fluorescence'. Together they form a unique fingerprint.

  • Cite this