Detection of characteristic signals from As-doped (less than 1 at.%) regions of silicon by transmission electron microscopy and convergent-beam electron diffraction

M. Terauchi, K. Tsuda, H. Mitsuishi, K. Kawamura

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)338-339
Number of pages2
JournalMicroscopy and Microanalysis
Volume10
Issue numberSUPPL. 2
DOIs
Publication statusPublished - 2004

ASJC Scopus subject areas

  • Instrumentation

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