TY - JOUR
T1 - Design study of two-aspherical-mirror anastigmat with reduced sensitivities to misalignments
T2 - Correction of higher-order aberrations
AU - Toyoda, M.
AU - Yanagihara, M.
PY - 2009/12/1
Y1 - 2009/12/1
N2 - A practical design method for correcting fifth and higher order aberration of two-aspherical-mirror optics was developed and applied to an imaging objective for soft-X-ray microscope. A sixth and eighth order deformation was applied to the both mirrors, and the deformation coefficients were optimized numerically to minimize a blur on the image plane. With this method, fifth or higher-order aberrations, which have remarkable effect on a fast soft-X-ray optics of a numerical aperture over 0.1, can be corrected without modifying third-order-aberration coefficients. A third-order aspherical design with a large misalignment tolerance was optimized to have a 50x magnification and a numerical aperture of 0.25, which resulted in a spatial resolution higher than 20 nm with tolerating a mirror decenter of 1μm.
AB - A practical design method for correcting fifth and higher order aberration of two-aspherical-mirror optics was developed and applied to an imaging objective for soft-X-ray microscope. A sixth and eighth order deformation was applied to the both mirrors, and the deformation coefficients were optimized numerically to minimize a blur on the image plane. With this method, fifth or higher-order aberrations, which have remarkable effect on a fast soft-X-ray optics of a numerical aperture over 0.1, can be corrected without modifying third-order-aberration coefficients. A third-order aspherical design with a large misalignment tolerance was optimized to have a 50x magnification and a numerical aperture of 0.25, which resulted in a spatial resolution higher than 20 nm with tolerating a mirror decenter of 1μm.
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U2 - 10.1088/1742-6596/186/1/012076
DO - 10.1088/1742-6596/186/1/012076
M3 - Article
AN - SCOPUS:73449118578
VL - 186
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
M1 - 012076
ER -