Design optimization of a non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings

Yuki Shimizu, Kazuki Mano, Hiroki Murakami, Shunsuke Hirota, Hiraku Matsukuma, Wei Gao

Research output: Contribution to journalArticle

4 Citations (Scopus)

Fingerprint Dive into the research topics of 'Design optimization of a non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings'. Together they form a unique fingerprint.

Engineering & Materials Science