Design of the electrostatic linear microactuator based on the inchworm motion

Seung Ki Lee; Masayoshi Esashi

doi:10.1016/0957-4158(95)00059-E

Design of the electrostatic linear microactuator based on the inchworm motion

Seung Ki Lee, Masayoshi Esashi

Micro System Integration Center (μSIC)

Research output: Contribution to journal › Article › peer-review

25 Citations (Scopus)

Abstract

A novel structure of a linear microactuator of which the moving principle is based on the motion of an inchworm has been designed and characterized. The proposed structure can overcome serious problems from which conventional linear microactuators suffer, primarily due to the moving principle that is the repetition of attachment and detachment of the moving part to the fixed part. According to the calculated results, the proposed microactuator can generate a force of a few mN and a moving speed of 13 cm min^-1 under conditions of 100V and a frequency of 1.4 kHz.

Original language	English
Pages (from-to)	963-972
Number of pages	10
Journal	Mechatronics
Volume	5
Issue number	8
DOIs	https://doi.org/10.1016/0957-4158(95)00059-E
Publication status	Published - 1995 Jan 1

ASJC Scopus subject areas

Mechanical Engineering
Computer Science Applications
Electrical and Electronic Engineering

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10.1016/0957-4158(95)00059-E

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abstract = "A novel structure of a linear microactuator of which the moving principle is based on the motion of an inchworm has been designed and characterized. The proposed structure can overcome serious problems from which conventional linear microactuators suffer, primarily due to the moving principle that is the repetition of attachment and detachment of the moving part to the fixed part. According to the calculated results, the proposed microactuator can generate a force of a few mN and a moving speed of 13 cm min-1 under conditions of 100V and a frequency of 1.4 kHz.",

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N2 - A novel structure of a linear microactuator of which the moving principle is based on the motion of an inchworm has been designed and characterized. The proposed structure can overcome serious problems from which conventional linear microactuators suffer, primarily due to the moving principle that is the repetition of attachment and detachment of the moving part to the fixed part. According to the calculated results, the proposed microactuator can generate a force of a few mN and a moving speed of 13 cm min-1 under conditions of 100V and a frequency of 1.4 kHz.

AB - A novel structure of a linear microactuator of which the moving principle is based on the motion of an inchworm has been designed and characterized. The proposed structure can overcome serious problems from which conventional linear microactuators suffer, primarily due to the moving principle that is the repetition of attachment and detachment of the moving part to the fixed part. According to the calculated results, the proposed microactuator can generate a force of a few mN and a moving speed of 13 cm min-1 under conditions of 100V and a frequency of 1.4 kHz.

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Design of the electrostatic linear microactuator based on the inchworm motion

Abstract

ASJC Scopus subject areas

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