Design of Electromagnetic Ring Resonator with Zero Anchorloss

Muhammad Jehanzeb Khan, Takashiro Tsukamoto, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, a novel design to reduce the anchorloss using additional stress cancellation structure is proposed. The stress cancellation structure as well as supporting structures was optimized by the numerical method. The resonator was fabricated and compared with the numerical result. The frequency mismatch between the fabricated device and simulated device was as small as 0.17%.

Original languageEnglish
Title of host publication21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages301-304
Number of pages4
ISBN (Electronic)9781665412674
DOIs
Publication statusPublished - 2021 Jun 20
Event21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States
Duration: 2021 Jun 202021 Jun 25

Publication series

Name21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference

Conference21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Country/TerritoryUnited States
CityVirtual, Online
Period21/6/2021/6/25

Keywords

  • MEMS
  • modal analysis
  • mode mis-match
  • resonant frequency
  • SOI
  • vibratory ring gyroscope

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Control and Optimization
  • Instrumentation

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