Design of a three-axis surface encoder with a blue-ray laser diode

Xinghui Li, Yuki Shimizu, Hiroshi Muto, So Ito, Wei Gao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A compact optical three-axis surface encoder, which can detect displacements in the XYZ-directions simultaneously by employing a scale grating with a short pitch (0.57 μm) and a single laser beam with a short wavelength (405 nm), is described in this paper. This surface encoder mainly consists of a blue-ray laser diode, a pair of two-dimensional diffractive gratings serving as scale grating and reference grating, respectively, and two quarter photodiodes (QPD) utilized for detecting output optical density. The displacements of the scale grating along X-, Y- and Z-directions are measured by analyzing interference signals caused by the phase shifts and light path difference of diffracted beams from the scale grating and reference grating. Basic measurement principle is illuminated, a compact surface encoder is designed and evaluation experiments are carried out.

Original languageEnglish
Title of host publicationEmerging Technology in Precision Engineering XIV
PublisherTrans Tech Publications Ltd
Pages913-918
Number of pages6
ISBN (Print)9783037855096
DOIs
Publication statusPublished - 2012
Event14th International Conference on Precision Engineering, ICPE 2012 - Hyogo, Japan
Duration: 2012 Nov 82012 Nov 10

Publication series

NameKey Engineering Materials
Volume523-524
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Other

Other14th International Conference on Precision Engineering, ICPE 2012
CountryJapan
CityHyogo
Period12/11/812/11/10

Keywords

  • Blue-ray laser diode
  • Metrology
  • Surface encoder
  • Three-axis displacement measurement
  • Two-dimensional grating

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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