Design of a thin film photodetector with angular sensitivity for optical micro-encoder

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we describe a directional thin film photodetector with the objective of optical micro-encoder application. A directional photodetector with a high absorption efficiency at a specific angle of incident light is based on guided-mode resonance(GMR) of subwavelength grating. The angular sensitivity of photodetector is designed to satisfy the condition that the diffracted light from the scale grating incidents at the angle of the resonance. A numerical calculation and actual device performance are presented.

Original languageEnglish
Title of host publication2006 5th IEEE Conference on Sensors
Pages279-282
Number of pages4
DOIs
Publication statusPublished - 2006 Dec 1
Event2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of
Duration: 2006 Oct 222006 Oct 25

Publication series

NameProceedings of IEEE Sensors

Other

Other2006 5th IEEE Conference on Sensors
CountryKorea, Republic of
CityDaegu
Period06/10/2206/10/25

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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