Design of a linear-rotary micro-stage

Yuxin Peng, Yasumasa Sakurai, Yoshikazu Arai, Yuki Shimizu, Wei Gao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper presents a linear-rotary micro-stage that can generate motions along and about the Z-axis using piezoelectric elements (PZTs). The small stroke of a PZT is extended by repeating the PZT motions based on a mechanism of impact friction drive. The friction drive mechanism has a simple driving unit, which only consists of a PZT element and a friction element. The moving element of the stage, which is a steel cylinder, is supported and actuated by a driving unit, which consists of two PZTs and a friction component made by permanent magnet. The magnetic force is employed for holding the moving element and stabilizing the driving condition. The dimension of the stage is 7.0 mm x 8.8 mm x 7.5 mm. The moving ranges of the stage are about 5.0 mm in the Z-direction and 360 degrees in the θ z-direction, respectively. The maximum moving speeds are approximately 30 mm/s and 84 rpm in the two directions, respectively.

Original languageEnglish
Title of host publicationSeventh International Symposium on Precision Engineering Measurements and Instrumentation
DOIs
Publication statusPublished - 2011 Dec 1
Event7th International Symposium on Precision Engineering Measurements and Instrumentation - Lijiang, China
Duration: 2011 Aug 72011 Aug 11

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8321
ISSN (Print)0277-786X

Other

Other7th International Symposium on Precision Engineering Measurements and Instrumentation
CountryChina
CityLijiang
Period11/8/711/8/11

Keywords

  • PZT
  • friction drive
  • linear
  • micro-stage
  • precision positioning
  • rotary
  • two-axis

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Peng, Y., Sakurai, Y., Arai, Y., Shimizu, Y., & Gao, W. (2011). Design of a linear-rotary micro-stage. In Seventh International Symposium on Precision Engineering Measurements and Instrumentation [832121] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8321). https://doi.org/10.1117/12.904884