Design issues for piezoresistive nanocantilever sensors with non-uniform nanoscale doping profiles

Yonggang Jiang, Masayoshi Esashi, Takahito Ono

Research output: Contribution to journalArticlepeer-review

Abstract

A modeling method for piezoresitive nanocantilevers using their geometrical parameters is described. The spring constant and the effective mass of piezoresistive nanocantilevers are formulated using theoretical and approximation equations, which shows a good agreement with the results of finite element analysis. The displacement sensitivity and minmum detectable force of piezoresistive nanocantilevers with non-uniform doping profiles are calculated by introducing a piezoresistive efficiency factor.

Original languageEnglish
Pages (from-to)270-271
Number of pages2
JournalIEEJ Transactions on Sensors and Micromachines
Volume131
Issue number7
DOIs
Publication statusPublished - 2011

Keywords

  • Minimum detectable force
  • Nanocantilever
  • Piezoresistive

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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