Design and testing of Omega mode imaging energy filters at 200 kV

K. Tsuno, T. Kaneyama, T. Honda, K. Tsuda, M. Terauchi, M. Tanaka

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34 Citations (Scopus)

Abstract

We designed and constructed an omega filter with following optical properties. The dispersions at 100 and 200 kV are 2.1 and 1.1 μm eV-1, respectively. Non-isochromatisity (difference of the selected energy between the centre and outer regions of an electron microscope image) is 1.3 and 2.5 eV at 100 and 200 kV, respectively, on a 25 mm diameter detector. The filter was installed and tested on a modified 200 kV high resolution TEM with an LaB6 cathode. Zero loss high resolution lattice image of [110]Si in thick specimen regions were clearly observed. Zero loss HOLZ CBED patterns of [111]Si were taken successfully up to 6.4°at an accelerating voltage of 100 kV. Since the slit was inserted to cut 17 eV first plasmon loss of Si, the maximum observable angle limited by the non-isochromatisity is 6.8°, which agrees with the experimental 6.4°. Based on these results, a new omega filter with a non-isochromatisity of 0.9 eV on the diameter 25 mm at 200 kV was designed.

Original languageEnglish
Pages (from-to)357-368
Number of pages12
JournalJournal of Electron Microscopy
Volume46
Issue number5
DOIs
Publication statusPublished - 1997 Jan 1

Keywords

  • Electron energy loss sepectroscopy
  • Electron optics
  • Energy analysis
  • Imaging energy filter
  • Omega filter

ASJC Scopus subject areas

  • Instrumentation

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