Design and testing of a compact non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings

Yuki Shimizu, Ryo Aihara, Kazuki Mano, Chong Chen, Yuanliu Chen, Xiuguo Chen, Wei Gao

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

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Engineering & Materials Science