Design and test of dual axis silicon resonant angular rate sensor using electromagnetic excitation and electromagnetic/capacitive detection

Biao Luo, Esashi Masayoshi, Ikeue Naokatsu, Tanaka Shuji, Ono Takahito, Ying Wu

Research output: Contribution to journalArticlepeer-review

Fingerprint Dive into the research topics of 'Design and test of dual axis silicon resonant angular rate sensor using electromagnetic excitation and electromagnetic/capacitive detection'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy