Design and test of a three-axis mosaic surface encoder

Woo Jae Kim, Yuki Shimizu, Koji Hosono, Ito So, Wei Gao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A three-axis mosaic surface encoder, which can measure the X-directional position and the Y-, Z-directional straightness of the linear stage in a long range, is proposed. The three-axis mosaic surface encoder is composed of multiple scanning probes and a mosaic scale grating. The mosaic scale grating is constructed by placing the multiple two-dimensional reflective-type scale gratings in a line to obtain long measurement range along the in-plane direction of a scale grating. In addition, the optical configuration of the encoder head, which employs multiple scanning probes to be projected on the mosaic scale grating, is proposed so that a long range measurement can be achieved by the mosaic scale gratings. With the proposed encoder head, the measurement information of the X-directional displacement can always be obtained from the probe which is not on the gaps of the mosaic scale grating. The proposed configuration was applied to the three-axis surface encoder, and basic performances of the proposed three-axis mosaic surface encoder are experimentally investigated.

Original languageEnglish
Title of host publicationEmerging Technology in Precision Engineering XIV
PublisherTrans Tech Publications Ltd
Pages919-924
Number of pages6
ISBN (Print)9783037855096
DOIs
Publication statusPublished - 2012
Event14th International Conference on Precision Engineering, ICPE 2012 - Hyogo, Japan
Duration: 2012 Nov 82012 Nov 10

Publication series

NameKey Engineering Materials
Volume523-524
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Other

Other14th International Conference on Precision Engineering, ICPE 2012
CountryJapan
CityHyogo
Period12/11/812/11/10

Keywords

  • Linear Stage
  • Mosaic Grating
  • Multiple-Probe
  • Optical Sensor
  • Position Measurement

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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