Design and simulation analysis of an integrated xyz micro-actuator for controlling displacement of a scanning probe

Van Hieu Dang, Van Tam Le, Kazuhiro Hane, Manh Hoang Chu

Research output: Contribution to journalArticlepeer-review

Abstract

We report an integrated micro-actuator for independent control of the displacement in three orthogonal directions. Electrostatic comb drives are employed for controlling the displace- ment in the x and y directions while a parallel plate-type actuation is used for driving the displacement in the z direction. The three actuators are mechanically coupled, but are elec- trically isolated. The calculation models are established for investigating the operation char- acteristics of the micro-actuator. The calculated results are in good agreement with those obtained by the finite element method in Comsol Multiphysics 4.3. The results of modal analysis show that the displacement in the three orthogonal directions can be independently controlled with low mode cross-talk.

Original languageEnglish
Pages (from-to)143-156
Number of pages14
JournalJournal of Theoretical and Applied Mechanics
Volume59
Issue number1
DOIs
Publication statusPublished - 2021

Keywords

  • Elec- trical isolation trench
  • Integrated xyz micro-actuator
  • Mechanical coupling bridge
  • Mode cross-talk

ASJC Scopus subject areas

  • Mechanical Engineering

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