Design and preparation of a 33-layer optical reflection filter of TiO2-SiO2 system

Xinrong Wang, Hiroshi Masumoto, Yoshihiro Someno, Lidong Chen, Toshio Hirai

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


The influences of the number of layers and the function of graded refractive index profiles on the profiles on the optical characteristics of a 33-layer optical reflection filters of TiO2-SiO2 system were investigated. The structure and the optical properties of the prepared films were in good agreement with the designed filter.

Original languageEnglish
Pages (from-to)933-937
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number3
Publication statusPublished - 2000 May

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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