Design and fabrication of photonic MEMS waveguide modulators

Akio Higo, Hiroyuki Fujita, Yoshiaki Nakano, Hiroshi Toshiyoshi

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    2 Citations (Scopus)

    Abstract

    We report the design and fabrication process of photonic MEMS actuators for optical attenuators integrated with a silicon photonic wire waveguide. This paper presents design and theoretical analysis of the silicon optical waveguide modulator with an electrostatic micromechanical structure actuated in the evanescent range. We observed a 100-nm MEMS displacement on a 5-um-wide and 50-um-long cantilever at a voltage of 20pp.

    Original languageEnglish
    Title of host publication2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
    Pages173-174
    Number of pages2
    DOIs
    Publication statusPublished - 2007 Dec 1
    Event2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS - Hualien, Taiwan, Province of China
    Duration: 2007 Aug 122007 Aug 16

    Publication series

    Name2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

    Other

    Other2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
    CountryTaiwan, Province of China
    CityHualien
    Period07/8/1207/8/16

    Keywords

    • Optical MEMS
    • Photonic waveguides
    • Silicon photonic MEMS

    ASJC Scopus subject areas

    • Control and Systems Engineering
    • Electrical and Electronic Engineering

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