Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application

M. Nakada, K. Takahashi, A. Higo, H. Fujita, H. Toshiyoshi

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.

    Original languageEnglish
    Title of host publication2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
    Pages48-49
    Number of pages2
    DOIs
    Publication statusPublished - 2008 Oct 23
    Event2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS - Freiburg, Germany
    Duration: 2008 Aug 112008 Aug 14

    Publication series

    Name2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

    Other

    Other2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
    CountryGermany
    CityFreiburg
    Period08/8/1108/8/14

    Keywords

    • Endoscope
    • Low resonance frequency
    • Parylene
    • Scanner

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering

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