Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application

M. Nakada; K. Takahashi; A. Higo; H. Fujita; H. Toshiyoshi

doi:10.1109/OMEMS.2008.4607822

Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application

M. Nakada, K. Takahashi, A. Higo, H. Fujita, H. Toshiyoshi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.

Original language	English
Title of host publication	2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
Pages	48-49
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2008.4607822
Publication status	Published - 2008 Oct 23
Event	2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS - Freiburg, Germany Duration: 2008 Aug 11 → 2008 Aug 14

Publication series

Name	2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

Other

Other	2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
Country/Territory	Germany
City	Freiburg
Period	08/8/11 → 08/8/14

Keywords

Endoscope
Low resonance frequency
Parylene
Scanner

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/OMEMS.2008.4607822

Cite this

Nakada, M., Takahashi, K., Higo, A., Fujita, H., & Toshiyoshi, H. (2008). Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application. In 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS (pp. 48-49). [4607822] (2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS). https://doi.org/10.1109/OMEMS.2008.4607822

Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application. / Nakada, M.; Takahashi, K.; Higo, A. et al.

2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. 2008. p. 48-49 4607822 (2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nakada, M, Takahashi, K, Higo, A, Fujita, H & Toshiyoshi, H 2008, Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application. in 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS., 4607822, 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS, pp. 48-49, 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS, Freiburg, Germany, 08/8/11. https://doi.org/10.1109/OMEMS.2008.4607822

Nakada M, Takahashi K, Higo A, Fujita H, Toshiyoshi H. Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application. In 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. 2008. p. 48-49. 4607822. (2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS). doi: 10.1109/OMEMS.2008.4607822

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AU - Toshiyoshi, H.

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Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application

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Keywords

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