Design and fabrication of optical MEMS modulator with silicon wire waveguide

Akio Higo, Hiroyuki Fujita, Hiroshi Toshiyoshi

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    2 Citations (Scopus)

    Abstract

    This paper presents design presents design and theoretical analysis of a silicon optical waveguide modulator with an electrostatic micromechanical structure actuated in the evanescent range over a silicon wire waveguide.

    Original languageEnglish
    Title of host publicationIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
    Pages78-79
    Number of pages2
    Publication statusPublished - 2006
    EventIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States
    Duration: 2006 Aug 212006 Aug 24

    Publication series

    NameIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

    Other

    OtherIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
    Country/TerritoryUnited States
    CityBig Sky, MT
    Period06/8/2106/8/24

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics

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