Abstract
An 8×8 matrix relay is developed by using microsystem design and conventional machining technology. The prototype has a multilayered planar structure and 64 electromagnetic bistable switches. The system size, 28 × 32 × 7 mm, is about one tenth that of conventional relays in volume. The actuator forces generated by the spiral spring and the electro- and permanent magnets are theoretically analyzed and the results agree well with experiments. The mechanical and magnetic interference between switch actuators and the electrostatic interference between signal lines is also theoretically analyzed. The contact force is proportional to the square of the device length, the mechanical and electrical interference are independent of the length, the electrostatic interference is proportional to the length, and the limit of miniaturization is one tenth the size of the prototype.
Original language | English |
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Title of host publication | An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems |
Publisher | Publ by IEEE |
Pages | 313-318 |
Number of pages | 6 |
ISBN (Print) | 078031834X |
Publication status | Published - 1994 Jan 1 |
Externally published | Yes |
Event | Proceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn Duration: 1994 Jan 25 → 1994 Jan 28 |
Other
Other | Proceedings of the IEEE Micro Electro Mechanical Systems |
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City | Oiso, Jpn |
Period | 94/1/25 → 94/1/28 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering