Design and fabrication of MEMS packaging

Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1137-1141
Number of pages5
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume70
Issue number9
DOIs
Publication statusPublished - 2004 Sep

Keywords

  • Array mems
  • Data storage
  • Electrical feedthrough
  • Mems
  • Packaging

ASJC Scopus subject areas

  • Mechanical Engineering

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