Design and fabrication of MEMS optical modulators integrated with PhC waveguides

Akio Higo, Satoshi Iwamoto, Masami Ishida, Yasuhiko Arakawa, Hiroyuki Fujita, Hiroshi Toshiyoshi, Akiko Gomyo, Masatoshi Tokushima, Hirohito Yamada

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    2 Citations (Scopus)

    Abstract

    We report the design and fabrication process of MEMS actuators for optical attenuators integrated with two-dimensional photonic crystal waveguide. Fabrication process has been improved from our previous model such that the SOI PhC layer is not delaminated during the sacrificial release in HF. The device was successfully developed and optically tested to obtain 2 dB modulation contrast at an 86V with -27 dB insertion loss.

    Original languageEnglish
    Title of host publicationIEEE/LEOS Optical MEMS 2005
    Subtitle of host publicationInternational Conference on Optical MEMS and Their Applications
    Pages113-114
    Number of pages2
    DOIs
    Publication statusPublished - 2005 Dec 1
    EventIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications - Oulu, Finland
    Duration: 2005 Aug 12005 Aug 4

    Publication series

    NameIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

    Other

    OtherIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
    CountryFinland
    CityOulu
    Period05/8/105/8/4

    Keywords

    • 2-Dimensinal Photonic Crystal Waveguide
    • Electrostatic Actuators
    • Optical attenuator

    ASJC Scopus subject areas

    • Engineering(all)

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