Design and fabrication of compact load sensor using AT-Cut quartz crystal resonators

Fumihito Arai, Keisuke Narumi, Ayumi Asakura, Yu Ching Lin, Toshio Fukuda

    Research output: Contribution to journalArticlepeer-review

    1 Citation (Scopus)

    Abstract

    The load sensor with AT-cut quartz crystal resonator has the characteristic that the resonant frequency changes by the external force, which achieves high sensitivity, high-speed response, and wide measurement range by a simple structure. Also it has the superior feature in the temperature and frequency stability. On the other hand, the quartz crystal resonator had been hardly applied to a force measurement because of low degree of mechanical characteristic, that is, it is weak to the impact, bend, and tension. The objective of this study is to construct the sensor mechanism that safely maintain the quartz crystal resonator for the external force with flat structure. We designed and analyzed a novel retention mechanism of the quartz crystal resonator for the flat structure. The size of the retention mechanism is 6.0 mmx5.0 mmx4.4 mm. The sensitivity of this sensor is 360 Hz/N. Output fluctuation of the sensor was less than 0.05 ppm when the static pressure of 1.5 MPa was applied. The proposed load sensor is small, sensitive and stable for static force measurement.

    Original languageEnglish
    Pages (from-to)1989-1994
    Number of pages6
    JournalNihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
    Volume75
    Issue number755
    DOIs
    Publication statusPublished - 2009 Jul

    Keywords

    • Micro machining
    • Micro-Mechanism
    • Nano &
    • Piezo-Element
    • Sensor
    • Structural design

    ASJC Scopus subject areas

    • Mechanics of Materials
    • Mechanical Engineering
    • Industrial and Manufacturing Engineering

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