Design and fabrication of an AT-cut quartz phononic Lamb wave resonator

Chia Hao Hung, Wei Shan Wang, Yu Ching Lin, Ting Wei Liu, Jia Hong Sun, Yung Yu Chen, Masayoshi Esashi, Tsung Tsong Wu

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

This paper presents results on the design and fabrication of an AT-cut quartz Lamb wave resonator with phononic crystal (PC) reflective gratings. The deep reactive ion etching process with a laboratory-made etcher was utilized to fabricate PC structures of the AT-cut quartz Lamb wave resonator. The finite element method was adopted to calculate the PC band structure, effective reflective distance from the PC boundary and further the resonant modes and admittance of the phononic Lamb wave resonant cavity. Through the comparison studies between the experimental and simulated results, a design process for the AT-cut quartz phononic Lamb wave resonator was proposed. It is noted that by using the phononic reflectors, the size of the Lamb wave resonator can be reduced significantly.

Original languageEnglish
Article number065025
JournalJournal of Micromechanics and Microengineering
Volume23
Issue number6
DOIs
Publication statusPublished - 2013 Jun 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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    Hung, C. H., Wang, W. S., Lin, Y. C., Liu, T. W., Sun, J. H., Chen, Y. Y., Esashi, M., & Wu, T. T. (2013). Design and fabrication of an AT-cut quartz phononic Lamb wave resonator. Journal of Micromechanics and Microengineering, 23(6), [065025]. https://doi.org/10.1088/0960-1317/23/6/065025