Design and fabrication of a thin-film silicon photodetector with angular sensitivity for optical micro-encoder

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2 Citations (Scopus)

Abstract

In this paper, we describe a directional thin-film silicon photodetector with the objective of optical micro-encoder application. A directional photodetector with high absorption efficiency at a specific angle of incident light is based on guided-mode resonance (GMR) of sub wavelength grating. The sensitive direction is tunable by changing the grating period. Numerical analysis, fabrication and device performance are presented.

Original languageEnglish
JournalIEEJ Transactions on Sensors and Micromachines
Volume127
Issue number6
Publication statusPublished - 2007 Jun 14

Keywords

  • Directional sensitivity
  • Optical absorbance
  • Resonant grating
  • Subwavelength grating
  • Thin-film photodetector

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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