Design and fabrication of a thin-film silicon photodetector with angular sensitivity for optical micro-encoder

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2 Citations (Scopus)

Abstract

In this paper, we describe a directional thin-film silicon photodetector with the objective of optical micro-encoder application. A directional photodetector with high absorption efficiency at a specific angle of incident light is based on guided-mode resonance (GMR) of sub wavelength grating. The sensitive direction is tunable by changing the grating period. Numerical analysis, fabrication and device performance are presented.

Original languageEnglish
Pages (from-to)309-313+1
JournalIEEJ Transactions on Sensors and Micromachines
Volume127
Issue number6
Publication statusPublished - 2007

Keywords

  • Directional sensitivity
  • Optical absorbance
  • Resonant grating
  • Subwavelength grating
  • Thin-film photodetector

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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