Abstract
In this paper, we report the design and fabrication of a scanning near-field optical microscopy (SNOM) probe with integrated zinc oxide photoconductive antennas for local terahertz (THz) spectroscopy. Photoconductive antennas are used as a THz pulse emitter and detector. A pyramidal tip with an aperture formed at the end of a silicon cantilever is used as an SNOM head.
Original language | English |
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Pages (from-to) | 135-142 |
Number of pages | 8 |
Journal | Sensors and Materials |
Volume | 22 |
Issue number | 3 |
Publication status | Published - 2010 |
Keywords
- Micro-electromechanical systems (MEMS)
- Scanning near-field optical microscopy
- Terahertz
- Terahertz time-domain spectroscopy
- Zinc oxide
ASJC Scopus subject areas
- Instrumentation
- Materials Science(all)