Abstract
In this paper, we report the design and fabrication of a scanning near-field optical microscopy (SNOM) probe with integrated zinc oxide photoconductive antennas for local terahertz (THz) spectroscopy. Photoconductive antennas are used as a THz pulse emitter and detector. A pyramidal tip with an aperture formed at the end of a silicon cantilever is used as an SNOM head.
| Original language | English |
|---|---|
| Pages (from-to) | 135-142 |
| Number of pages | 8 |
| Journal | Sensors and Materials |
| Volume | 22 |
| Issue number | 3 |
| Publication status | Published - 2010 |
Keywords
- Micro-electromechanical systems (MEMS)
- Scanning near-field optical microscopy
- Terahertz
- Terahertz time-domain spectroscopy
- Zinc oxide
ASJC Scopus subject areas
- Instrumentation
- Materials Science(all)