Design and fabrication of a pure-rotation microscanner with self-aligned electrostatic vertical combdrives in double SOI wafer

Y. Mizoguchi, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

13 Citations (Scopus)

Abstract

This paper describes a microscanner actuated by self-aligned electrostatic vertical combdrives. A tilt motion without unwanted vertical or lateral piston motions of a mirror, namely, a pure-rotation is very important for a scanning device for high resolution. We have designed and fabricated a pure-rotation microscanner in double SOI wafer actuated by self-aligned vertical electrostatic combdrives, and measured the characteristics. The design of the comb electrodes makes it possible to produce the tilt motion of the microscanner without piston motions. The static optical deflection angle of the device was measured as 7.6 degrees at 150Vdc. The resonant frequency was found to be 660Hz.

Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages65-68
Number of pages4
DOIs
Publication statusPublished - 2005 Nov 9
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 2005 Jun 52005 Jun 9

Publication series

NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume1

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period05/6/505/6/9

Keywords

  • Pure-rotation
  • Scanner
  • Self-alignment

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Mizoguchi, Y., & Esashi, M. (2005). Design and fabrication of a pure-rotation microscanner with self-aligned electrostatic vertical combdrives in double SOI wafer. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 65-68). [1C3.4] (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1). https://doi.org/10.1109/SENSOR.2005.1496360