Design and fabrication of a phononic-crystal-based Love wave resonator in GHz range

Ting Wei Liu, Yao Chuan Tsai, Yu Ching Lin, Takahito Ono, Shuji Tanaka, Tsung Tsong Wu

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)

Abstract

This paper presents a method for designing and fabricating a Love wave resonator utilizing the phononic crystal (PC) as the reflectors. The PCs were formed by depositing 2D, periodically etched silica film on a quartz substrate. We analyzed the PC structure, and within its partial bandgap we designed a one-port resonator that contained a set of inter-digital transducer (IDT) inside the resonant cavity bonded by two PC arrays. With sub-micrometer structures, the resonator was designed to operate at 1.25 GHz. The device was fabricated by employing the microelectromechanical system (MEMS) fabrication technology and the resonant performance was evaluated.

Original languageEnglish
Article number124201
JournalAIP Advances
Volume4
Issue number12
DOIs
Publication statusPublished - 2014 Dec 1

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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