Design and fabrication of a miniaturized three-degree-of-freedom piezoresistive acceleration sensor based on MEMS technology using deep reactive ion etching

Vu Ngoc Hung, Nguyen Van Minh, Le Van Minh, Nguyen Huu Hung, Chu Manh Hoang, Dzung Viet Dao, Ranjith Amarasinghe, Bui Thanh Tung, Susumu Sugiyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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