Design and fabrication of a gradient-index phononic quartz plate lens

Tsung Tsong Wu, Meng Jhen Chiou, Ikusei Rin, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

This paper presents results on the numerical and experimental studies of focusing of Lamb waves in an AT-cut quartz gradient-index phononic crystal (GRIN PC) plate lens. The band structures of square-latticed AT-cut quartz phononic crystal plates with different filling ratios are analyzed using the finite element method. The anisotropic properties of the lowest anti-symmetric Lamb mode are discussed. Then, the design of an AT-cut quartz based GRIN PC plate lens is addressed. In the micro-fabrication, the deep reactive ion etching (Deep-RIE) process with a laboratory-made etcher was utilized to fabricate the GRIN PC plate lens on an 80μm thick AT-cut quartz plate. Interdigital transducers were fabricated directly on the quartz plate to generate plate waves and a vibro-meter was used to detect the wave fields. The measured results on the focusing are in good accordance with the numerical predictions. Results of this study may serve as a basis for developing an active micro plate lens and related devices.

Original languageEnglish
Title of host publicationPhotonic and Phononic Properties of Engineered Nanostructures IV
PublisherSPIE
ISBN (Print)9780819499073
DOIs
Publication statusPublished - 2014 Jan 1
EventPhotonic and Phononic Properties of Engineered Nanostructures IV - San Francisco, CA, United States
Duration: 2014 Feb 32014 Feb 6

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8994
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherPhotonic and Phononic Properties of Engineered Nanostructures IV
CountryUnited States
CitySan Francisco, CA
Period14/2/314/2/6

Keywords

  • Band gap
  • Gradient-Index
  • Lamb wave
  • Phononic crystal
  • Quartz

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Wu, T. T., Chiou, M. J., Rin, I., & Ono, T. (2014). Design and fabrication of a gradient-index phononic quartz plate lens. In Photonic and Phononic Properties of Engineered Nanostructures IV [89940G] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8994). SPIE. https://doi.org/10.1117/12.2047881