Design and development of an ultra-compact drum-shaped chamber for combinatorial pulsed laser deposition

M. Katayama, K. Itaka, Y. Matsumoto, H. Koinuma

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)

Abstract

We have designed a compact combinatorial pulsed laser deposition (PLD) chamber as a building block of a desktop laboratory for advanced materials research. Development of small-size systems for the growth and characterization of films would greatly help in interconnecting a variety of analytical tools for rapid screening of advanced materials. This PLD chamber has four special features: (1) a drum-shaped growth chamber, (2) a waterwheel-like combinatorial masking system, (3) a multi-target system having one feedthrough, and (4) a small reflection high-energy electron diffraction (RHEED) system. The performance of this system is demonstrated by the RHEED intensity oscillation during homoepitaxial growth of SrTiO 3 as well as by simultaneous fabrication of a ternary phase diagram of rare earth-doped Y 2 O 3 phosphors.

Original languageEnglish
Pages (from-to)2461-2465
Number of pages5
JournalApplied Surface Science
Volume252
Issue number7
DOIs
Publication statusPublished - 2006 Jan 21
Externally publishedYes
EventProceedings of the Third Japan-US Workshop on Combinatorial Material Science and Technology CMST-e SI -
Duration: 2004 Dec 72004 Dec 10

Keywords

  • Combinatorial mask
  • Combinatorial synthesis
  • Phosphors
  • Pulsed laser deposition
  • Reflection high-energy electron diffraction

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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