Design and construction of the motion mechanism of an XY micro-stage for precision positioning

Yuki Shimizu, Yuxin Peng, Junji Kaneko, Toyohiro Azuma, So Ito, Wei Gao, Tien Fu Lu

Research output: Contribution to journalArticlepeer-review

43 Citations (Scopus)

Fingerprint Dive into the research topics of 'Design and construction of the motion mechanism of an XY micro-stage for precision positioning'. Together they form a unique fingerprint.

Chemical Compounds

Physics & Astronomy

Engineering & Materials Science