Depth profiling using the glancing-incidence and glancing-takeoff x-ray fluorescence method

K. Tsuji, S. Sato, K. Hirokawa

Research output: Contribution to journalArticle

24 Citations (Scopus)

Abstract

We have developed a new analytical method, which we call the glancing-incidence and glancing-takeoff x-ray fluorescence (GIT-XRF) method. In this method, a fluorescent x ray is measured at various combinations of incident and takeoff angles. A nondestructive depth profiling is possible by using this GIT-XRF method, because the effective observation depth is changed by both the incident and takeoff angles. Here, we introduce the idea of depth profiling using the GIT-XRF method, and then we apply this method to an Au-Si interface reaction.

Original languageEnglish
Pages (from-to)4847-4852
Number of pages6
JournalReview of Scientific Instruments
Volume66
Issue number10
DOIs
Publication statusPublished - 1995 Dec 1

ASJC Scopus subject areas

  • Instrumentation

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