Depth profiling by ion-beam analysis

K. Ishii, S. Morita

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


In an ion-beam analysis, a sample is bombarded with charged-particle beams and characteristic X-rays (PIXE), nuclear γ-rays (PIGE) or charged particles produced in the target material are measured. A method for deducing a concentration depth profile of an element in the sample from a yield curve of these reaction products as a function of the projectile energy is derived on the basis of the least-squares method. Validity of this method is demonstrated taking an example of PIXE.

Original languageEnglish
Pages (from-to)151-157
Number of pages7
JournalActa Physica Hungarica
Issue number2-3
Publication statusPublished - 1989 Jun
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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