Depth profiling by ion-beam analysis

K. Ishii; S. Morita

doi:10.1007/BF03156058

Depth profiling by ion-beam analysis

K. Ishii, S. Morita

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

In an ion-beam analysis, a sample is bombarded with charged-particle beams and characteristic X-rays (PIXE), nuclear γ-rays (PIGE) or charged particles produced in the target material are measured. A method for deducing a concentration depth profile of an element in the sample from a yield curve of these reaction products as a function of the projectile energy is derived on the basis of the least-squares method. Validity of this method is demonstrated taking an example of PIXE.

Original language	English
Pages (from-to)	151-157
Number of pages	7
Journal	Acta Physica Hungarica
Volume	65
Issue number	2-3
DOIs	https://doi.org/10.1007/BF03156058
Publication status	Published - 1989 Jun
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy(all)

Access to Document

10.1007/BF03156058

Cite this

@article{e1747a9f1ff94d61b8402a2a8fd690f0,

title = "Depth profiling by ion-beam analysis",

abstract = "In an ion-beam analysis, a sample is bombarded with charged-particle beams and characteristic X-rays (PIXE), nuclear γ-rays (PIGE) or charged particles produced in the target material are measured. A method for deducing a concentration depth profile of an element in the sample from a yield curve of these reaction products as a function of the projectile energy is derived on the basis of the least-squares method. Validity of this method is demonstrated taking an example of PIXE.",

author = "K. Ishii and S. Morita",

year = "1989",

month = jun,

doi = "10.1007/BF03156058",

language = "English",

volume = "65",

pages = "151--157",

journal = "Acta Physica Hungarica",

issn = "0231-4428",

publisher = "Akademiai Kiado",

number = "2-3",

}

TY - JOUR

T1 - Depth profiling by ion-beam analysis

AU - Ishii, K.

AU - Morita, S.

PY - 1989/6

Y1 - 1989/6

N2 - In an ion-beam analysis, a sample is bombarded with charged-particle beams and characteristic X-rays (PIXE), nuclear γ-rays (PIGE) or charged particles produced in the target material are measured. A method for deducing a concentration depth profile of an element in the sample from a yield curve of these reaction products as a function of the projectile energy is derived on the basis of the least-squares method. Validity of this method is demonstrated taking an example of PIXE.

AB - In an ion-beam analysis, a sample is bombarded with charged-particle beams and characteristic X-rays (PIXE), nuclear γ-rays (PIGE) or charged particles produced in the target material are measured. A method for deducing a concentration depth profile of an element in the sample from a yield curve of these reaction products as a function of the projectile energy is derived on the basis of the least-squares method. Validity of this method is demonstrated taking an example of PIXE.

UR - http://www.scopus.com/inward/record.url?scp=30244509654&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=30244509654&partnerID=8YFLogxK

U2 - 10.1007/BF03156058

DO - 10.1007/BF03156058

M3 - Article

AN - SCOPUS:30244509654

VL - 65

SP - 151

EP - 157

JO - Acta Physica Hungarica

JF - Acta Physica Hungarica

SN - 0231-4428

IS - 2-3

ER -

Depth profiling by ion-beam analysis

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this