Deposition of DLC film with adhesive W-DLC layer on stainless steel and its tribological properties

Takanori Takeno, Toshifumi Sugawara, Hiroyuki Miki, Toshiyuki Takagi

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46 Citations (Scopus)


Tribological properties of a diamond-like carbon (DLC) coating with an adhesive tungsten-containing DLC (W-DLC) layer were investigated. The coatings were deposited onto AISI316L steel substrates and Si wafers using plasma enhanced chemical vapor deposition and tungsten co-sputtering of the metal target. Methane and argon gases were used as the precursor of the coatings. In this study, three types of coatings were evaluated: DLC/W-DLC on AISI316L (DLC-1), DLC/W-DLC on Si wafer (DLC-2), and DLC on Si wafer (DLC-3). The structural characterizations were performed by transmission electron microscopy and tapping mode atomic force microscopy. At the boundary between the W-DLC layer and the AISI316L substrate, microscopic decohesion or delamination was not observed. The surface roughness of the DLC-1 coating was greater than that of the DLC-2 coating. This feature was derived from the surface roughness of the initial surface of the AISI316L substrate. Friction tests were performed using a rotation-type ball-on-flat configuration tribometer. The observed friction of the DLC-1 coating was unstable compared with the DLC-2 or DLC-3 coatings. This was due to wear debris which had risen to the friction surface resulting in unstable friction on the DLC-1 coating. During the friction studies, the top DLC layer was removed from the adhesive W-DLC layer because the adhesive strength at this part was not enough. In order to achieve the low and stable friction of the DLC coating with the W-DLC layer on AISI316L, it is necessary to improve the smoothness of the surface and the adhesion between the DLC coating and the W-DLC layer.

Original languageEnglish
Pages (from-to)1023-1027
Number of pages5
JournalDiamond and Related Materials
Issue number5-8
Publication statusPublished - 2009 May


  • DLC
  • Double-layered structure
  • Friction
  • Metal-doped DLC

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering


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