Deposition of conductivity-switching polyimide film by molecular layer deposition and electrical modification using scanning probe microscope

S. Yoshida, T. Ono, M. Esashi

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)

Abstract

This Letter reports on the deposition of a conductivity-switching polyimide film as a recording medium formed by molecular layer deposition (MLD). It also reports on the electrical modification on it using a scanning probe microscope (SPM). The polyimide film is uniformly deposited on an Au surface by MLD. As the result of the electrical modification, highly conductive dots pattern with a narrow pitch of approximately 50nm is successfully defined by applying pulsed voltages. The current ratio of the electrical modified area to unmodified area reached 300 at least.

Original languageEnglish
Pages (from-to)321-323
Number of pages3
JournalMicro and Nano Letters
Volume5
Issue number5
DOIs
Publication statusPublished - 2010 Oct

ASJC Scopus subject areas

  • Bioengineering
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

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