Deposition and microstructure of Ti-containing diamond-like carbon nanocomposite films

Won Jae Yang, Tohru Sekino, Kwang Bo Shim, Koichi Niihara, Keun Ho Auh

Research output: Contribution to journalArticlepeer-review

36 Citations (Scopus)


Ti-containing diamond-like carbon (DLC) films were deposited by plasma decomposition of CH4/Ar gas mixtures with an introduction of tetrakis(dimethylamino)titanium (TDMAT, Ti[(CH3)2N] 4), which was used as a precursor of titanium. The films deposited were found to be nanocomposite coatings consisting of TiN nanocrystalline clusters and amorphous hydrocarbon (a-C:H), indicating that the nanocrystalline clusters were embedded in the DLC matrix. The crystallinity of TiN clusters, as well as the Ti atomic concentrations in the films, increased with an increase of substrate temperature. The substrate temperature applied to form a crystalline phase in the DLC matrix induced a graphitization of amorphous hydrocarbon matrix. The increase of volume fraction of TiN nanocrystalline clusters in the DLC matrix enhanced the mechanical properties of nanostructured coatings, although the graphite-like structural transition of DLC matrix happened due to the applied heating.

Original languageEnglish
Pages (from-to)252-258
Number of pages7
JournalThin Solid Films
Issue number2
Publication statusPublished - 2005 Feb 14


  • Diamond-like carbon
  • Hardness
  • Metal-organic precursor
  • Nanostructures

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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