Dependence of thermal decomposition of metal organic gases on metal surface for gas distribution system

S. Yamashita, K. Watanuki, H. Ishii, Y. Shiba, M. Kitano, Y. Shirai, S. Sugawa, T. Ohmi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The performance of semiconductor films is influenced by the purity of the metal-organic (MO) gas that is used, so it is important to investigate the decomposition behavior of MO gases. The decomposition of dimethylzinc, trimethylgallium and trimethylaluminum is found to depend on the metal surface in the reactor tube. A reactor tube with an Al 2O 3 surface exhibits the highest temperature as which decomposition of the MO gases started, and the highest activation energy. These results indicate that the Al 2O 3 surface has the lowest catalytic activity for the decomposition of these MO gases. However, decomposition of dimethylzinc occurs at room temperature when it is trapped in a reactor tube. This decomposition ceases past a certain trapped time, so the catalytic activity for the decomposition of MO gases by surfaces stabilizes. Therefore, Al 2O 3 surfaces are useful for application in MO gas distribution systems.

Original languageEnglish
Title of host publicationState-of-the-Art Program on Compound Semiconductors 52, SOTAPOCS 52
Pages121-128
Number of pages8
Edition13
DOIs
Publication statusPublished - 2010 Dec 1
EventState-of-the-Art Program on Compound Semiconductors 52, SOTAPOCS 52 - 218th ECS Meeting - Las Vegas, NV, United States
Duration: 2010 Oct 102010 Oct 15

Publication series

NameECS Transactions
Number13
Volume33
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

OtherState-of-the-Art Program on Compound Semiconductors 52, SOTAPOCS 52 - 218th ECS Meeting
CountryUnited States
CityLas Vegas, NV
Period10/10/1010/10/15

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint Dive into the research topics of 'Dependence of thermal decomposition of metal organic gases on metal surface for gas distribution system'. Together they form a unique fingerprint.

Cite this