Abstract
Amorphous Tb-Fe thin films prepared by sputtering method in the compositional range TbxFe1-x(x=0-0.5) have been investigated in view of their potential for use in electromagnetic thin film actuators. We examined the magnetostriction and the coercive force for the Tb-Fe films for different sputtering conditions to obtain both soft magnetic properties and large magnetostriction in this system. As a result, we obtained Tb-Fe thin films having large magnetostrictions (180×10-6at 1kOe) and low coercive force (60–70 Oe). These films were prepared under the conditions of the composition of 45-50at%Tb, Ar gas pressure of 4mTorr, rf input power of 200W and using water cooled substrates. A trial actuator using magnetostrictive thin films is also reported.
Original language | English |
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Pages (from-to) | 3129-3131 |
Number of pages | 3 |
Journal | IEEE Transactions on Magnetics |
Volume | 29 |
Issue number | 6 |
DOIs | |
Publication status | Published - 1993 Jan 1 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering