Dependence of magnetic properties on sputtering pressure for Fe-Al-O alloy films made by carousel-type sputtering

Yuji Uehara, Shoji Ikeda

Research output: Contribution to journalArticle

Abstract

We have investigated the magnetic anisotropy and permeability of FeAlO films with Bs ∼ 1.8T and ρ ∼ 1 μΩm. The films were prepared using a carousel-type sputtering system. Although an aligning magnetic field to induce uniaxial magnetic anisotropy was not applied to the substrates during deposition, the FeAlO films in the as-deposited state had uniaxial magnetic anisotropy. The anisotropy strongly depends on sputtering pressure. The direction of the magnetic anisotropy shifts 90° from the rotation direction to the radial direction of the substrate holder as the sputtering pressure increases. In the pressure range of 0.3-0.4 Pa, the measured μ-f properties are largely different from the theoretical one because of magnetic anisotropy dispersion. The anisotropy dispersion can be explained by a model with two orthogonal anisotropy components.

Original languageEnglish
Pages (from-to)4297-4301
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume42
Issue number7 A
Publication statusPublished - 2003 Jul 1

Keywords

  • Fe-Al-O film
  • Magnetic anisotropy
  • Magnetoelastic effect
  • Permeability
  • Soft magnetic properties
  • Sputtering

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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