Abstract
We have investigated the magnetic anisotropy and permeability of FeAlO films with Bs ∼ 1.8T and ρ ∼ 1 μΩm. The films were prepared using a carousel-type sputtering system. Although an aligning magnetic field to induce uniaxial magnetic anisotropy was not applied to the substrates during deposition, the FeAlO films in the as-deposited state had uniaxial magnetic anisotropy. The anisotropy strongly depends on sputtering pressure. The direction of the magnetic anisotropy shifts 90° from the rotation direction to the radial direction of the substrate holder as the sputtering pressure increases. In the pressure range of 0.3-0.4 Pa, the measured μ-f properties are largely different from the theoretical one because of magnetic anisotropy dispersion. The anisotropy dispersion can be explained by a model with two orthogonal anisotropy components.
Original language | English |
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Pages (from-to) | 4297-4301 |
Number of pages | 5 |
Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
Volume | 42 |
Issue number | 7 A |
DOIs | |
Publication status | Published - 2003 Jul |
Keywords
- Fe-Al-O film
- Magnetic anisotropy
- Magnetoelastic effect
- Permeability
- Soft magnetic properties
- Sputtering
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)