Density measurement of molten CaF2 by an electrostatic levitator

I. Minato, H. Fukuyama, T. Ishikawa, P. F. Paradis, J. Yu, S. Yoda

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

High-quality single crystalline calcium fluoride (CaF2) has been of considerable practical concern as an optical lens to an excimer laser stepper in the deep-ultraviolet region due to its excellent transparency. Highly accurate thermophysical properties of molten CaF2 are essential as input data for a numerical simulation of the crystal growth process. The density of molten CaF2 has been successfully determined in the stable and undercooled liquid states (1600-1820 K) with an electrostatic levitator. The temperature dependence of the density of molten CaF2 is given by ρkg· m-3 = 3580-0.63T(±1.6%). The coefficient of cubical expansion of molten CaF2 has been determined to be β/K-1 = 1/5683 - T.

Original languageEnglish
Pages (from-to)1173-1180
Number of pages8
JournalInternational Journal of Thermophysics
Volume27
Issue number4
DOIs
Publication statusPublished - 2006 Jul

Keywords

  • CaF
  • Density
  • Electrostatic levitator
  • Undercooled liquid

ASJC Scopus subject areas

  • Condensed Matter Physics

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