TY - JOUR
T1 - Densification of hBN with the as-coated SiO2 nanolayer by rotary chemical vapor deposition
AU - Zhang, Jianfeng
AU - Zhang, Xin
AU - Li, Gaiye
AU - Wu, Yuping
AU - Goto, Takashi
N1 - Publisher Copyright:
©2015 The Ceramic Society of Japan. All rights reserved.
PY - 2015
Y1 - 2015
N2 - SiO2 nanolayer, less than 50 nm in thickness, was coated on hexagonal boron nitride (hBN) plate powders by rotary chemical vapor deposition (RCVD) to assist densification of sinter-hard hBN. In RCVD process, tetraethylorthosilicate (TEOS) precursor heated at 110°C was carried into a reactor by argon, and then reacted with oxygen to form SiO2 at 700°C, with by-products of CO2 or H2O gases vacuumed out the reactor. Full expose of the surface of hBN powders to TEOS, argon and oxygen gases by RCVD technique and stable proceeding of decomposition reaction of TEOS contributed to the uniform distribution of SiO2 nanolayer. Viscous or liquid flow of uniform SiO2 nanolayer sintering aids assisted densification process of hBN and elevated its relative density to a maximum value of 96.2% at 1900°C.
AB - SiO2 nanolayer, less than 50 nm in thickness, was coated on hexagonal boron nitride (hBN) plate powders by rotary chemical vapor deposition (RCVD) to assist densification of sinter-hard hBN. In RCVD process, tetraethylorthosilicate (TEOS) precursor heated at 110°C was carried into a reactor by argon, and then reacted with oxygen to form SiO2 at 700°C, with by-products of CO2 or H2O gases vacuumed out the reactor. Full expose of the surface of hBN powders to TEOS, argon and oxygen gases by RCVD technique and stable proceeding of decomposition reaction of TEOS contributed to the uniform distribution of SiO2 nanolayer. Viscous or liquid flow of uniform SiO2 nanolayer sintering aids assisted densification process of hBN and elevated its relative density to a maximum value of 96.2% at 1900°C.
KW - Hexagonal boron nitride (hbn)
KW - Rotary chemical vapor deposition
KW - SiO nanolayer
KW - Spark plasma sintering
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U2 - 10.2109/jcersj2.123.423
DO - 10.2109/jcersj2.123.423
M3 - Article
AN - SCOPUS:84928889962
VL - 123
SP - 423
EP - 427
JO - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
JF - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
SN - 1882-0743
IS - 1437
ER -