Demonstrating 30-nm spatial resolution of three-multilayer-mirror objective for extreme ultraviolet microscopy: Imaging test by observing lithography mask

Mitsunori Toyoda, Kenjiro Yamasoe, Akifumi Tokimasa, Kentaro Uchida, Tetsuo Harada, Tsuneo Terasawa, Tsuyoshi Amano, Takeo Watanabe, Mihiro Yanagihara, Hiroo Kinoshita

    Research output: Contribution to journalArticlepeer-review

    10 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Demonstrating 30-nm spatial resolution of three-multilayer-mirror objective for extreme ultraviolet microscopy: Imaging test by observing lithography mask'. Together they form a unique fingerprint.

    Engineering & Materials Science

    Physics & Astronomy