Demolding in ultraviolet nanoimprinting assisted by a nanoscale lubricating fluid layer of condensed alternative chlorofluorocarbon

Masaru Nakagawa, Shu Kaneko, Shunya Ito

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    11 Citations (Scopus)

    Abstract

    We demonstrated that demolding in ultraviolet (UV) nanoimprinting was assisted by a nanoscale lubricating fluid layer of a liquefied 1,1,1,3,3-pentafluoropropane (PFP) gas. UV-curable Resin A composed of glycerol 1,3-diglycerolate diacrylate with low PFP absorption showed low surface roughness of 22-nm line-and-space imprint patterns with the smallest line edge roughness (LER) value of 3σ = 1.8 nm. As the molar ratio of 1,6-hexanediol diacrylate with large PFP absorption was increased in the UV-curable resin, the morphological characteristics worsened. Although thin cured films of Resin A possessed a large surface free energy of 57.6mJ m-2 Resin A could be used for step-and-repeat UV nanoimprinting with bare and fluorinated silica molds. Quartz crystal microbalance measurements suggested that a PFP adsorption layer was formed at a film surface of uncured Resin A upon exposure to PFP gas and functioned as a nanoscale lubricating fluid layer during UV nanoimprinting.

    Original languageEnglish
    Pages (from-to)786-793
    Number of pages8
    JournalBulletin of the Chemical Society of Japan
    Volume89
    Issue number7
    DOIs
    Publication statusPublished - 2016 Jul

    ASJC Scopus subject areas

    • Chemistry(all)

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