Degradation of polymers for resist using microbubbles on ozonized water

Kohei Matsuura, Takashi Nishiyama, Eriko Sato, Masashi Yamamoto, Masayoshi Takahashi, Kunihiko Koike, Hideo Horibe

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)
Original languageEnglish
Pages (from-to)299-301
Number of pages3
JournalJournal of Photopolymer Science and Technology
Volume28
Issue number2
DOIs
Publication statusPublished - 2015 Aug 19
Externally publishedYes

Keywords

  • Environmental
  • Microbubble
  • Ozone
  • Photoresist
  • Removal

ASJC Scopus subject areas

  • Polymers and Plastics
  • Organic Chemistry
  • Materials Chemistry

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